2-1
Advanced Semiconductor Materials & Device Integration
- 3D Advanced Logic Platform
- Memory Device Platform
- Oxide Semiconductor Platform
- 2D Material Device Platform
4 platforms in this zone
Chip-Driven Taiwan Semiconductor Resource Sharing Platform
Equipment quick search
Search 350 shared tools by category, subcategory, county or equipment code: metrology & analysis 164, process equipment 128, design & simulation 58.
Platforms
Platforms
Equipment from every participant is linked into complete process flows. Each platform lists its process steps, TSRI tools and alternatives from other organizations.
2-2
Quantum Device Fabrication
1 platform in this zone
2-3
Advanced Packaging Process
2 platforms in this zone
2-4
Compound Semiconductor Process
2 platforms in this zone
2-5
Optoelectronic & Physical Measurement
2 platforms in this zone
2-6
Material Property Measurement
- Material Imaging & Structure Analysis Platform
- Atom Probe Analysis Platform
- Surface Composition Analysis Platform
- Mechanical & Electrical Property Platform
4 platforms in this zone
6 zones and 15 platforms, from materials and device integration, quantum devices and advanced packaging to compound processes and materials metrology.
All platformsNews
More news
News
The Chip-Driven Taiwan Semiconductor Resource Sharing Platform is live
The new platform brings together equipment from all participants, with equipment search, platform guides and TSRI equipment status, and meets WCAG AA.
TSRI maintenance schedule and open slots for November
9 tools are scheduled for routine maintenance in November; all others remain open. Please check equipment status before booking.
Registration open: 2026 Academic Resource Sharing Showcase
Held in Hsinchu on 28 November, featuring shared-equipment results and cross-university collaborations.
ParticipantsParticipants
Participants
across Taiwan
TSRI, ITRI, TIRI and seven university semiconductor centers — resources in the north, centre, south and east of Taiwan are all searchable here.
3in Hsinchu
NorthNorthern University Semiconductor & Nano-device Centers
TaichungCentral University Semiconductor & MEMS Centers
TainanSouthern University Semiconductor Center
KaohsiungSouthern University Compound Semiconductor Center
HualienEastern University Center
10Participants
350+Shared resources
3Categories
48,216Views this month
10 academic and research organizations share 350+ process, metrology and design resources; 5 are in the north, 3 of them in Hsinchu. Resource pages were viewed 48,216 times this month (Oct 1–27), up 12.4% on last month.
Participants
The 10 participants are spread across the north (5), centre (2), south (2) and east (1). TSRI provides the most resources (112), and every listing names its owner and contact person.
Links
Related links
All 3 external systems open in a new window: service requests, metrology booking and chip-innovation services are handled in each system.
Supervising agencies
- Chip-based Industrial Innovation Office晶創臺灣推動辦公室
- National Institutes of Applied Research國家實驗研究院
- Industrial Technology Research Institute工業技術研究院